JPH0744027Y2 - 半導体圧力センサ - Google Patents
半導体圧力センサInfo
- Publication number
- JPH0744027Y2 JPH0744027Y2 JP1987145863U JP14586387U JPH0744027Y2 JP H0744027 Y2 JPH0744027 Y2 JP H0744027Y2 JP 1987145863 U JP1987145863 U JP 1987145863U JP 14586387 U JP14586387 U JP 14586387U JP H0744027 Y2 JPH0744027 Y2 JP H0744027Y2
- Authority
- JP
- Japan
- Prior art keywords
- gauge
- pressure
- shear type
- strain
- shear
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 title description 10
- 229910052710 silicon Inorganic materials 0.000 claims description 9
- 239000010703 silicon Substances 0.000 claims description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 8
- 238000005259 measurement Methods 0.000 claims description 8
- 238000010008 shearing Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 14
- 238000010586 diagram Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 239000013078 crystal Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 5
- 238000012937 correction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000002184 metal Substances 0.000 description 4
- 238000005530 etching Methods 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 238000010276 construction Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 230000000149 penetrating effect Effects 0.000 description 2
- 229920002545 silicone oil Polymers 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000005468 ion implantation Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 238000002161 passivation Methods 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 150000003376 silicon Chemical class 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987145863U JPH0744027Y2 (ja) | 1987-09-24 | 1987-09-24 | 半導体圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987145863U JPH0744027Y2 (ja) | 1987-09-24 | 1987-09-24 | 半導体圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6450454U JPS6450454U (en]) | 1989-03-29 |
| JPH0744027Y2 true JPH0744027Y2 (ja) | 1995-10-09 |
Family
ID=31414826
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987145863U Expired - Lifetime JPH0744027Y2 (ja) | 1987-09-24 | 1987-09-24 | 半導体圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0744027Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102008043644A1 (de) * | 2008-11-11 | 2010-05-12 | Robert Bosch Gmbh | Drucksensor |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5515650A (en) * | 1978-07-19 | 1980-02-02 | Sankei Sangyo Kk | Oil treating apparatus |
-
1987
- 1987-09-24 JP JP1987145863U patent/JPH0744027Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6450454U (en]) | 1989-03-29 |
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